Combinatorial approach to the interface structure characterizations of SrTiO~3 on Si(100) [4281-06]: Fid-Bau Portal

Combinatorial approach to the interface structure characterizations of SrTiO~3 on Si(100) [4281-06]

Ahmet, P. / Koida, T. / Takakura, M. / Nakajima, K. / Tanaka, M. / Takeguchi, M. / Yoshimoto, M. / Koinuma, H. / Chikyow, T. / International Society for Optical Engineering

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Combinatorial approach to the interface structure characterizations of SrTiO~3 on Si(100) [4281-06]

Ahmet, P. / Koida, T. / Takakura, M. / Nakajima, K. / Tanaka, M. / Takeguchi, M. / Yoshimoto, M. / Koinuma, H. / Chikyow, T. / International Society for Optical Engineering

Combinatorial approach to the interface structure characterizations of SrTiO~3 on Si(100) [4281-06]

Ahmet, P. / Koida, T. / Takakura, M. / Nakajima, K. / Tanaka, M. / Takeguchi, M. / Yoshimoto, M. / Koinuma, H. / Chikyow, T. / International Society for Optical Engineering

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Titel:

Combinatorial approach to the interface structure characterizations of SrTiO~3 on Si(100) [4281-06]

Beteiligte:

Ahmet, P. (Autor:in) / Koida, T. (Autor:in) / Takakura, M. (Autor:in) / Nakajima, K. (Autor:in) / Tanaka, M. (Autor:in) / Takeguchi, M. (Autor:in) / Yoshimoto, M. (Autor:in) / Koinuma, H. (Autor:in) / Chikyow, T. (Autor:in) / Jabbour, G. E.

Kongress:

Conference; 2nd, Combinatorial and composition spread techniques in materials and device development ; 2001 ; San Jose, CA

Erschienen in:

Combinatorial and composition spread techniques in materials and device development ; 43-50

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4281

Erscheinungsdatum:

01.01.2001

Format / Umfang:

8 pages

ISBN:

0819439592

ISSN:

0277-786X

Medientyp:

Aufsatz (Konferenz)

Format:

Sprache:

Englisch

Schlagwörter:

combinatorial spread techniques , composition spread techniques , device development , spread techniques

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