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Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
Rizzo, A. (Autor:in) / Signore, M. A. (Autor:in) / Di Luccio, T. (Autor:in) / Tagliente, M. A. (Autor:in) / de Riccardis, M. F. (Autor:in) / Vincenzini, P.
11th, International ceramics conference; Ceramics congress ; 2006 ; Acireale, Italy
01.01.2006
6 pages
Held on CD-ROM
Aufsatz (Konferenz)
Englisch
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