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Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations
Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations
Fabrication of Si Nanowire Biosensor Using FIB and its Evaluations
Truong, A.H. (Autor:in) / Sone, H. (Autor:in) / Hosaka, S. (Autor:in) / Hosaka, Sumio
International conference; 4th, Advanced micro-device engineering; Advanced micro-device engineering IV ; 2012 ; Kiryu, Japan
01.01.2014
5 pages
Includes bibliographical references and indexes.
Aufsatz (Konferenz)
Englisch
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