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Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions
Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions
Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions
Linnarsson, M. K. (Autor:in) / Svensson, B. G. (Autor:in) / Andersson, T. G. (Autor:in) / Wang, S. M. (Autor:in)
APPLIED SURFACE SCIENCE ; 70/71 ; 40
01.01.1993
40 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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Sputter profiling of AlGaAs/GaAs superlattice structures using oxygen and argon ions
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