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Atomic force microscopy: a key to direct wafer bonding technology
Atomic force microscopy: a key to direct wafer bonding technology
Atomic force microscopy: a key to direct wafer bonding technology
Watt, V. H. C. (Autor:in) / Moinpour, M. (Autor:in) / Bower, R. (Autor:in) / Sundararaman, R. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 14 ; 96
01.01.1995
96 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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