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High energy xenon ion beam assisted deposition of TiN film and its industrial application
High energy xenon ion beam assisted deposition of TiN film and its industrial application
High energy xenon ion beam assisted deposition of TiN film and its industrial application
Wang, X. (Autor:in) / Yang, G. (Autor:in) / Liu, X. (Autor:in) / Zheng, Z. (Autor:in) / Huang, W. (Autor:in) / Zou, S. (Autor:in) / Martin, P. J. (Autor:in) / Bendavid, A. (Autor:in) / Han, J. G. (Autor:in) / Yoon, J. S. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 31 ; 363-369
01.01.1996
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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