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Electrical properties and topography of SnO~2 thin films prepared by reactive sputtering
Electrical properties and topography of SnO~2 thin films prepared by reactive sputtering
Electrical properties and topography of SnO~2 thin films prepared by reactive sputtering
Brousseau, J.-L. (Autor:in) / Bourque, H. (Autor:in) / Tessier, A. (Autor:in) / Leblanc, R. M. (Autor:in)
APPLIED SURFACE SCIENCE ; 110 ; 351-358
01.01.1997
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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Electrical properties and topography of SnO~2 thin films prepared by reactive sputtering
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