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Quantum chemical study on p-doping effect of F-terminated silicon surface reaction with silane
Quantum chemical study on p-doping effect of F-terminated silicon surface reaction with silane
Quantum chemical study on p-doping effect of F-terminated silicon surface reaction with silane
Tachibana, A. (Autor:in) / Sakata, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 117/118 ; 54-60
01.01.1997
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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