Gettering efficiencies of polysilicon-, stacking fault- and He-implanted backsides for Cu and Ni

Hoelzl, R. / Range, K. J. / Fabry, L. et al. | British Library Online Contents | 2000

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. et al. | British Library Online Contents | 2009

Phosphorus Diffusion Gettering of Gold in Silicon

Sveinbjoernsson, E. O. / Engstroem, O. / Soedervall, U. | British Library Online Contents | 1993

Gettering of Transition Metals in Multicrystalline Silicon

McHugo, S. A. / Hieslmair, H. / Weber, E. R. | British Library Online Contents | 1995

Diffusion, solubility and gettering of copper in silicon

Istratov, A. A. / Flink, C. / Hieslmair, H. et al. | British Library Online Contents | 2000