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Analysis of local lattice strain around oxygen precipitates in silicon crystals using CBED technique
Analysis of local lattice strain around oxygen precipitates in silicon crystals using CBED technique
Analysis of local lattice strain around oxygen precipitates in silicon crystals using CBED technique
Yonemura, M. (Autor:in) / Sueoka, K. (Autor:in) / Kamei, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 130-132 ; 208-213
01.01.1998
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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