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Continuum based modeling of silicon integrated circuit processing: An object oriented approach
Continuum based modeling of silicon integrated circuit processing: An object oriented approach
Continuum based modeling of silicon integrated circuit processing: An object oriented approach
Law, M. E. (Autor:in) / Cea, S. M. (Autor:in) / De la Rubia, T. D.
01.01.1998
20 pages
Aufsatz (Zeitschrift)
Englisch
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