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Modification of parylene AF-4 surfaces using activated water vapor
Modification of parylene AF-4 surfaces using activated water vapor
Modification of parylene AF-4 surfaces using activated water vapor
Martini, D. (Autor:in) / Shepherd, K. (Autor:in) / Sutcliffe, R. (Autor:in) / Kelber, J. (Autor:in) / Edwards, H. (Autor:in) / Martin, R. S. (Autor:in)
APPLIED SURFACE SCIENCE ; 141 ; 89-100
01.01.1999
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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Vapor deposition of parylene-F using hydrogen as carrier gas
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