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Electronic defect states at ultrathin SiO"2/Si interfaces from photoelectron yield spectroscopy
Electronic defect states at ultrathin SiO"2/Si interfaces from photoelectron yield spectroscopy
Electronic defect states at ultrathin SiO"2/Si interfaces from photoelectron yield spectroscopy
Miyazaki, S. (Autor:in) / Maruyama, T. (Autor:in) / Kohno, A. (Autor:in) / Hirose, M. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 185-190
01.01.1999
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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