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Pulsed laser deposition of a-CNx:H films: the role of target-to-substrate distance and laser fluence
Pulsed laser deposition of a-CNx:H films: the role of target-to-substrate distance and laser fluence
Pulsed laser deposition of a-CNx:H films: the role of target-to-substrate distance and laser fluence
Gonzalez, P. (Autor:in) / Soto, R. (Autor:in) / Leon, B. (Autor:in) / Perez-Amor, M. (Autor:in) / Szorenyi, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 154-155 ; 454-457
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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