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On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2
On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2
On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2
Piglmayer, K. (Autor:in) / Schieche, H. (Autor:in) / Chabicovsky, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 154-155 ; 365-368
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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