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Formation of Epitaxial Mesa Structures on 4H-SiC (0001) and (11&unknown;20) Substrates
Formation of Epitaxial Mesa Structures on 4H-SiC (0001) and (11&unknown;20) Substrates
Formation of Epitaxial Mesa Structures on 4H-SiC (0001) and (11&unknown;20) Substrates
Chen, Y. (Autor:in) / Kimoto, T. (Autor:in) / Takeuchi, Y. (Autor:in) / Matsunami, H. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 255-258
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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