Texture Investigations In Damascene Copper Interconnects

Mirpuri, K. / Szpunar, J. A. / Kozaczek, K. | British Library Online Contents | 2002

Self-Annealing Textures of Copper Damascene Interconnects

Lee, D. N. / Lee, H. J. | British Library Online Contents | 2004

Copper Electroplating from Sulfate Electrolytes Containing Crown Ethers

Kuznetsov, V. V. / Skibina, L. M. / Geshel, S. V. | British Library Online Contents | 2003

Microtexture Measurement of Copper Damascene Line with EBSD

Kim, D.-I. / Paik, J.-M. / Joo, Y.-C. et al. | British Library Online Contents | 2002

Optimum physical-chemical pre-treatment of copper damascene wastewater

Smith, E. / Bayan, M. / Daniels, M. et al. | British Library Conference Proceedings | 2003