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Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM-EELS and XPS
Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM-EELS and XPS
Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM-EELS and XPS
Schamm, S. (Autor:in) / Berjoan, R. (Autor:in) / Barathieu, P. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 107 ; 58-65
01.01.2004
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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