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3-Dimensional Micro-Structure Inspection by Phase-Shifting Digital Holography
3-Dimensional Micro-Structure Inspection by Phase-Shifting Digital Holography
3-Dimensional Micro-Structure Inspection by Phase-Shifting Digital Holography
Yun, H. Y. (Autor:in) / Jeong, S. J. (Autor:in) / Kang, J. W. (Autor:in) / Hong, C. K. (Autor:in) / Lee, S.-S. / Yoon, D.-J. / Lee, J.-H. / Lee, S.
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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