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Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process
Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process
Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process
Youn, S. W. (Autor:in) / Kang, C. G. (Autor:in) / Shen, W. P. / Xu, J. Q.
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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