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Patterning with block copolymer thin films
Patterning with block copolymer thin films
Patterning with block copolymer thin films
Segalman, R. A. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 48 ; 191-226
01.01.2005
36 pages
Aufsatz (Zeitschrift)
Englisch
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