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Boron lattice location in room temperature ion implanted Si crystal
Boron lattice location in room temperature ion implanted Si crystal
Boron lattice location in room temperature ion implanted Si crystal
Piro, A. M. (Autor:in) / Romano, L. (Autor:in) / Mirabella, S. (Autor:in) / Grimaldi, M. G. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 249-252
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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