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Determination of the debris produced from poly(ethylene terephthalate) during KrF excimer laser ablation
Determination of the debris produced from poly(ethylene terephthalate) during KrF excimer laser ablation
Determination of the debris produced from poly(ethylene terephthalate) during KrF excimer laser ablation
Shin, D. S. (Autor:in) / Lee, J. H. (Autor:in) / Suh, J. (Autor:in) / Kim, T. H. (Autor:in)
APPLIED SURFACE SCIENCE ; 252 ; 2319-2327
01.01.2006
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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