Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering: Fid-Bau Portal

Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering

Garcia-Gonzalez, L. / Morales-Hernandez, J. / Espinoza-Beltran, F. J. / Munoz-Saldana, J. / Scholz, T. / Schneider, G. A.

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Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering

Garcia-Gonzalez, L. / Morales-Hernandez, J. / Espinoza-Beltran, F. J. / Munoz-Saldana, J. / Scholz, T. / Schneider, G. A.

Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering

Garcia-Gonzalez, L. / Morales-Hernandez, J. / Espinoza-Beltran, F. J. / Munoz-Saldana, J. / Scholz, T. / Schneider, G. A.

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Titel:

Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering

Beteiligte:

Garcia-Gonzalez, L. (Autor:in) / Morales-Hernandez, J. (Autor:in) / Espinoza-Beltran, F. J. (Autor:in) / Munoz-Saldana, J. (Autor:in) / Scholz, T. (Autor:in) / Schneider, G. A. (Autor:in)

Erschienen in:

MATERIALS SCIENCE FORUM ; 509 ; 93-98

Erscheinungsdatum:

01.01.2006

Format / Umfang:

6 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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