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Decomposition Characteristic of Carbon Tetrafluoride Using 2.45GHz Microwave at Various Gases
Decomposition Characteristic of Carbon Tetrafluoride Using 2.45GHz Microwave at Various Gases
Decomposition Characteristic of Carbon Tetrafluoride Using 2.45GHz Microwave at Various Gases
Choi, S. Y. (Autor:in) / Taguchi, Y. (Autor:in) / Minami, W. (Autor:in) / Kim, L. H. (Autor:in) / Kim, H. J. (Autor:in) / Kim, H. / Hojo, J. / Lee, S. W.
01.01.2007
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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