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Structural and Mechanical Properties of AlN Films by Pulsed Bias Arc Ion Plating
Structural and Mechanical Properties of AlN Films by Pulsed Bias Arc Ion Plating
Structural and Mechanical Properties of AlN Films by Pulsed Bias Arc Ion Plating
01.01.2007
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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