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Measurement of High-NA Axisymmetric Aspherical Surface with Continuous Interference Method
Measurement of High-NA Axisymmetric Aspherical Surface with Continuous Interference Method
Measurement of High-NA Axisymmetric Aspherical Surface with Continuous Interference Method
Nagaike, Y. (Autor:in) / Kuriyagawa, T. (Autor:in) / Gao, W. (Autor:in) / Yan, J.W. (Autor:in) / Yoshihara, N. (Autor:in)
KEY ENGINEERING MATERIALS ; 389/390 ; 102-107
01.01.2009
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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