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Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing
Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing
Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing
Hotta, K. (Autor:in) / Hirose, K. (Autor:in) / Tanaka, Y. (Autor:in) / Kawata, K. (Autor:in) / Eryu, O. (Autor:in)
MATERIALS SCIENCE FORUM ; 600/603 ; 823-826
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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Improvements in Electrical Properties of SiC Surface Using Mechano-Chemical Polishing
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