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Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer
Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer
Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer
Chen, J. (Autor:in) / Lien, S.C. (Autor:in) / Shin, Y.C. (Autor:in) / Feng, Z.C. (Autor:in) / Kuan, C.H. (Autor:in) / Zhao, J.H. (Autor:in) / Lu, W.J. (Autor:in)
MATERIALS SCIENCE FORUM ; 600/603 ; 39-42
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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