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Study of hydrogen passivation in SiN~x:H films using Fourier transform infrared and photoluminescence spectroscopy
Study of hydrogen passivation in SiN~x:H films using Fourier transform infrared and photoluminescence spectroscopy
Study of hydrogen passivation in SiN~x:H films using Fourier transform infrared and photoluminescence spectroscopy
Chopra, S. (Autor:in) / Gupta, R.P. (Autor:in) / Joshi, B.C. (Autor:in) / Eranna, G. (Autor:in) / Banerjee, S. (Autor:in)
MATERIALS SCIENCE -WROCLAW- ; 27 ; 559-568
01.01.2009
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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