Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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Contact damage of tetrahedral amorphous carbon thin films on silicon substrates
Contact damage of tetrahedral amorphous carbon thin films on silicon substrates
Contact damage of tetrahedral amorphous carbon thin films on silicon substrates
Borrero-Lopez, O. (Autor:in) / Hoffman, M. (Autor:in) / Bendavid, A. (Autor:in) / Martin, P.J. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 24 ; 3286-3293
01.01.2009
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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