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On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator
On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator
On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator
Corigliano, A. (Autor:in) / Domenella, L. (Autor:in) / Langfelder, G. (Autor:in)
EXPERIMENTAL MECHANICS ; 50 ; 695-707
01.01.2010
13 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.1
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