Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films
Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films
Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films
Tien, C. L. (Autor:in)
APPLIED SURFACE SCIENCE ; 257 ; 481-486
01.01.2010
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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