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Influence of reactive gas and temperature on structural properties of magnetron sputtered CrSiN coatings
Influence of reactive gas and temperature on structural properties of magnetron sputtered CrSiN coatings
Influence of reactive gas and temperature on structural properties of magnetron sputtered CrSiN coatings
Shah, H. N. (Autor:in) / Jayaganthan, R. (Autor:in) / Kaur, D. (Autor:in)
APPLIED SURFACE SCIENCE ; 257 ; 5535-5543
01.01.2011
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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