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Long Si~3N~4 Nanowires Fabricated by PECVD
Long Si~3N~4 Nanowires Fabricated by PECVD
Long Si~3N~4 Nanowires Fabricated by PECVD
Song, J.W. (Autor:in) / Ma, X.Y. (Autor:in) / Wang, R. / Wu, Y. / Wu, X.
01.01.2011
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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