Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y. / Jacob, C. / Ohshima, S. et al. | British Library Online Contents | 2002

Low Temperature Selective and Lateral Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates

Jacob, C. / Pirouz, P. / Nishino, S. | British Library Online Contents | 2001

Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane

Jacob, C. / Hong, M.-H. / Chung, J. et al. | British Library Online Contents | 2000

beta -SiC NWs Grown on Patterned and MEMS Silicon Substrates

Watts, B.E. / Attolini, G. / Rossi, F. et al. | British Library Online Contents | 2011

Selective formation of silicon nanowires on pre-patterned substrates

Wan, L. / Gong, W. / Jiang, K. et al. | British Library Online Contents | 2009