Experimental Studies on Water Vapor Plasma Oxidation and Thermal Oxidation of 4H-SiC (0001) for Clarification of the Atomic-Scale Flattening Mechanism in Plasma Assisted Polishing

Deng, H. / Endo, K. / Yamamura, K. | British Library Online Contents | 2014

Atomic Structure of the (0001) Corundum Surface

Puchin, V. E. / Gale, J. D. / Shluger, A. L. et al. | British Library Online Contents | 1997

The effect of abrasive hardness on the chemical-assisted polishing of (0001) plane sapphire

Zhu, H. / Niesz, D. E. / Greenhut, V. A. et al. | British Library Online Contents | 2005

The influence of subsurface species on desorption kinetics : 18O2/Zr(0001)

Kang, Y. C. / Ramsier, R. D. | British Library Online Contents | 2002

Atomic Structure of 6H-SiC (0001) and (000 $$\bar{1}$$ )

Li, L. / Sakurai, T. | Springer Verlag | 2000