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On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
Van Bui, H. (Autor:in) / Kovalgin, A. Y. (Autor:in) / Wolters, R. A. (Autor:in)
APPLIED SURFACE SCIENCE ; 269 ; 45-49
01.01.2013
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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