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High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer
High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer
High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer
Gu, G.-Y. (Autor:in) / Zhu, L.-M. (Autor:in) / Su, C.-Y. (Autor:in)
SMART MATERIALS AND STRUCTURES ; 23 ; 105007
01.01.2014
105007 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
530
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