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Research on Micro Machining of Slit Grating
Research on Micro Machining of Slit Grating
Research on Micro Machining of Slit Grating
Liu, J.Y. (Autor:in) / Li, L. (Autor:in) / He, N. (Autor:in) / Wu, X. (Autor:in) / Zhan, Z.B. (Autor:in) / Wang, S.L. (Autor:in)
MATERIALS SCIENCE FORUM ; 800/801 ; 167-174
01.01.2014
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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