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Antireflection silicon structures with hydrophobic property fabricated by three-beam laser interference
Antireflection silicon structures with hydrophobic property fabricated by three-beam laser interference
Antireflection silicon structures with hydrophobic property fabricated by three-beam laser interference
APPLIED SURFACE SCIENCE ; 346 ; 574-579
01.01.2015
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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