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Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP
Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP
Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP
APPLIED SURFACE SCIENCE ; 353 ; 499-503
01.01.2015
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP
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