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Measurement of surface roughness of plasma-deposited films using laser speckles
Measurement of surface roughness of plasma-deposited films using laser speckles
Measurement of surface roughness of plasma-deposited films using laser speckles
Kim, Byungwhan (Autor:in) / Seo, Junhyun (Autor:in)
Applied surface science ; 359 ; 204-208
01.01.2015
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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