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Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a 'top-to-bottom' level patterning sequence
Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a 'top-to-bottom' level patterning sequence
Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a 'top-to-bottom' level patterning sequence
Choi, Sungwoo (Autor:in) / Kook, YunHo (Autor:in) / Kim, ChulHo (Autor:in) / Yoo, SoonSung (Autor:in) / Park, Kwon-Shik (Autor:in) / Lee, Jinhyung (Autor:in) / Park, Changsu (Autor:in) / Ok, Jong G. (Autor:in) / Kang, Shinill (Autor:in)
Applied surface science ; 428 ; 895-899
01.01.2018
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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