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Preparation of AlSb thin films by magnetron sputtering technology and its deliquescence mechanism
Preparation of AlSb thin films by magnetron sputtering technology and its deliquescence mechanism
Preparation of AlSb thin films by magnetron sputtering technology and its deliquescence mechanism
Song, Huijin (Autor:in) / Gu, Peng (Autor:in) / Zhu, Xinghua (Autor:in) / Yan, Qiang (Autor:in) / Yang, Dingyu (Autor:in)
Materials science in semiconductor processing ; 89 ; 126-130
01.01.2019
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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