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Large area of ultrathin alumina membranes toward innovative heterogeneous nanostructure arrays for solar energy conversion
Ordered nanostructure arrays are attracting intensive scientific attention because of their many and varied applications. However, it is still a challenge to achieve ordered nanostructure patterning over a relatively large area (for instance on the wafer scale) by a technique that will allow high throughput, large pattern area and low equipment costs. Part of the work reported here is the achievement of facile transferring of ultrathin alumina membranes (UTAMs) which have been attached on wafer-scale substrates without any twisting, folding, cracking or contamination because of the unique design of the fabrication and transferring processes. The crucial element of this method is fixing the prepared 4-inch UTAM onto a wafer-scale substrate before removing the remaining Al and the alumina barrier layer. The thickness and surface smoothing of the UTAMs play a vital role in this process. By using these perfectly transferred UTAMs as masks, various nanostructuring patterns including nanoparticles, nanomeshes, and nanowire arrays have been fabricated on wafer-scale substrates with tunable and uniform dimensions. The method is a template method, which is not reliant on a specific requirement for the UTAMs, the substrates and the deposited materials. It thus provides a cost-effective platform for the fabrication of ordered nanostructures on large substrates for a range of applications in nanotechnology. The work has included fabricating hexagonal arrays of TiO2 nanotubes (TNTs) with an excellent crystalline quality by techniques combining anodic aluminum oxide templates and atomic layer deposition (ALD). Absorption spectroscopic analysis showed that the optical absorption band edge of the TNTs exhibited a red shift as the diameter of the nanotubes was tuned to be larger and the distance between two nanotubes became smaller, while the wall thickness of the nanotube was kept constant. Subsequent finite-difference time-domain simulations supported the observation from the theoretical aspect and revealed a large near-field ...
Large area of ultrathin alumina membranes toward innovative heterogeneous nanostructure arrays for solar energy conversion
Ordered nanostructure arrays are attracting intensive scientific attention because of their many and varied applications. However, it is still a challenge to achieve ordered nanostructure patterning over a relatively large area (for instance on the wafer scale) by a technique that will allow high throughput, large pattern area and low equipment costs. Part of the work reported here is the achievement of facile transferring of ultrathin alumina membranes (UTAMs) which have been attached on wafer-scale substrates without any twisting, folding, cracking or contamination because of the unique design of the fabrication and transferring processes. The crucial element of this method is fixing the prepared 4-inch UTAM onto a wafer-scale substrate before removing the remaining Al and the alumina barrier layer. The thickness and surface smoothing of the UTAMs play a vital role in this process. By using these perfectly transferred UTAMs as masks, various nanostructuring patterns including nanoparticles, nanomeshes, and nanowire arrays have been fabricated on wafer-scale substrates with tunable and uniform dimensions. The method is a template method, which is not reliant on a specific requirement for the UTAMs, the substrates and the deposited materials. It thus provides a cost-effective platform for the fabrication of ordered nanostructures on large substrates for a range of applications in nanotechnology. The work has included fabricating hexagonal arrays of TiO2 nanotubes (TNTs) with an excellent crystalline quality by techniques combining anodic aluminum oxide templates and atomic layer deposition (ALD). Absorption spectroscopic analysis showed that the optical absorption band edge of the TNTs exhibited a red shift as the diameter of the nanotubes was tuned to be larger and the distance between two nanotubes became smaller, while the wall thickness of the nanotube was kept constant. Subsequent finite-difference time-domain simulations supported the observation from the theoretical aspect and revealed a large near-field ...
Large area of ultrathin alumina membranes toward innovative heterogeneous nanostructure arrays for solar energy conversion
Al-Haddad, Ahmed Sukur Hameed (Autor:in) / Lei, Yong / Köhler, Michael / Gao, Pu-Xian
12.10.2016
Hochschulschrift
Elektronische Ressource
Englisch
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