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Fully integrated transducer platform with cavity optomechanical readout
Research and development of transducers based on cavity optomechanics is a topic of high interest particularly because these transducers enable measurement of mechanical motion down to the fundamental limit of precision imposed by quantum mechanics. The development of an on-chip cavity optomechanical transducer platform that combines high bandwidth and sensitivity near the standard quantum limit with compactness, robustness, small size, and potential for low cost batch fabrication inherent in MEMS is demonstrated as a proof of concept study. Design, fabrication and characterization of fully integrated and fiber pigtailed transducers is presented. The devices combine high sensitivity (0.14 - 40 fm·Hz^(-1/2), high bandwidth optomechanical readout and built-in thermal and electrostatic actuation. It is implemented by a double-side wafer-scale microfabrication process combining one e-beam, six stepper, and three contact mask aligner lithography steps. The SiN probes can be actuated using an electrical signal supplied to an integrated thermal or electrostatic actuator. The probe is evanescently coupled to a high-Q (10^5 - 2 x 10^6) optical whispering gallery mode of the optical microdisk cavity and the motion is detected by measuring the resonance frequency shift of the optical cavity mode. The actuator can be used to dynamically move the probe as well as to tune the distance between the cantilever and the optical cavity, to change the sensitivity and range of measurement of the cantilever. One side of the probe overhangs the edge of the chip, where it can be easily coupled to a variety of off-chip samples and physical systems of interest. The modular design of the transducer allows for parallelization, which enables the possibility of sensor arrays for simultaneous detection of multiple forces or other physical properties. Parallelization is shown on a 2x1 array, which can be easily extended to larger array architectures. The application of the probe arrays and single probes in a commercial scanning probe microscope ...
Fully integrated transducer platform with cavity optomechanical readout
Research and development of transducers based on cavity optomechanics is a topic of high interest particularly because these transducers enable measurement of mechanical motion down to the fundamental limit of precision imposed by quantum mechanics. The development of an on-chip cavity optomechanical transducer platform that combines high bandwidth and sensitivity near the standard quantum limit with compactness, robustness, small size, and potential for low cost batch fabrication inherent in MEMS is demonstrated as a proof of concept study. Design, fabrication and characterization of fully integrated and fiber pigtailed transducers is presented. The devices combine high sensitivity (0.14 - 40 fm·Hz^(-1/2), high bandwidth optomechanical readout and built-in thermal and electrostatic actuation. It is implemented by a double-side wafer-scale microfabrication process combining one e-beam, six stepper, and three contact mask aligner lithography steps. The SiN probes can be actuated using an electrical signal supplied to an integrated thermal or electrostatic actuator. The probe is evanescently coupled to a high-Q (10^5 - 2 x 10^6) optical whispering gallery mode of the optical microdisk cavity and the motion is detected by measuring the resonance frequency shift of the optical cavity mode. The actuator can be used to dynamically move the probe as well as to tune the distance between the cantilever and the optical cavity, to change the sensitivity and range of measurement of the cantilever. One side of the probe overhangs the edge of the chip, where it can be easily coupled to a variety of off-chip samples and physical systems of interest. The modular design of the transducer allows for parallelization, which enables the possibility of sensor arrays for simultaneous detection of multiple forces or other physical properties. Parallelization is shown on a 2x1 array, which can be easily extended to larger array architectures. The application of the probe arrays and single probes in a commercial scanning probe microscope ...
Fully integrated transducer platform with cavity optomechanical readout
Michels, Thomas (Autor:in) / Rangelow, Ivo W. / Gotszalk, Teodor Pawel / Moheimani, Reza
22.05.2020
Hochschulschrift
Elektronische Ressource
Englisch
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