Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Heating furnace for producing polycrystalline silicon and method for producing polycrystalline silicon
The invention discloses a heating furnace and a method for producing polycrystalline silicon, and belongs to the technical field of heating furnaces. The method comprises the following steps: firstly placing silicon material in a fused silica ceramic crucible, forming a Si3N4 coating on the inner surface of the fused silica ceramic crucible, and placing a thermal baffle at the upper part of the silicon material, and then placing the crucible and the silicon material, the Si3N4 coating and the thermal baffle in an induction furnace together, electrifying to melt the silicon material, directionally solidifying silicon liquid after the silicon material is completely molten, thus obtaining the polycrystalline silicon.
Heating furnace for producing polycrystalline silicon and method for producing polycrystalline silicon
The invention discloses a heating furnace and a method for producing polycrystalline silicon, and belongs to the technical field of heating furnaces. The method comprises the following steps: firstly placing silicon material in a fused silica ceramic crucible, forming a Si3N4 coating on the inner surface of the fused silica ceramic crucible, and placing a thermal baffle at the upper part of the silicon material, and then placing the crucible and the silicon material, the Si3N4 coating and the thermal baffle in an induction furnace together, electrifying to melt the silicon material, directionally solidifying silicon liquid after the silicon material is completely molten, thus obtaining the polycrystalline silicon.
Heating furnace for producing polycrystalline silicon and method for producing polycrystalline silicon
QU YINHU (Autor:in) / CHENG XIAOLE (Autor:in) / LI XUEYI (Autor:in) / FU HANGUANG (Autor:in)
06.05.2015
Patent
Elektronische Ressource
Englisch
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