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Aluminum oxide ceramic metallization method used for brazing
The invention provides an aluminum oxide ceramic metallization method used for brazing. The method comprises the steps that 1, aluminum oxide ceramic is cleaned and then sintered for 50-70 min with the temperature kept at 1,000 DEG C-1,200 DEG C; 2, a vacuum magnetron sputtering or vacuum evaporating or ion plating method is adopted for sequentially depositing a Ti or Zr or Hf metal layer, a Mo or Cr metal layer and a Ni or Cu metal layer on the surface of the part, uncovered with aluminum foil, of the aluminum oxide ceramic; 3, the aluminum oxide ceramic on which the metal layers are deposited is placed into a vacuum sintering furnace, the vacuum sintering furnace is vacuumized, heating is started when the vacuum degree in the furnace reaches 4*10<-3> Pa, the temperature in the furnace is raised to 430 DEG C-480 DEG C and is kept for 20-40 min, then the temperature is raised to 900 DEG C-1,200 DEG C and is kept for 20-60 min, after temperature keeping is finished, the aluminum oxide ceramic is cooled along with the furnace to the room temperature so that metallization of the aluminum oxide ceramic can be completed, and in the temperature rising and keeping processes, the vacuum degree in the furnace is kept higher than 6*10<-3> Pa. The process can be simplified, the metallization cost can be reduced, and the metallization effect of the high-purity aluminum oxide ceramic can be improved.
Aluminum oxide ceramic metallization method used for brazing
The invention provides an aluminum oxide ceramic metallization method used for brazing. The method comprises the steps that 1, aluminum oxide ceramic is cleaned and then sintered for 50-70 min with the temperature kept at 1,000 DEG C-1,200 DEG C; 2, a vacuum magnetron sputtering or vacuum evaporating or ion plating method is adopted for sequentially depositing a Ti or Zr or Hf metal layer, a Mo or Cr metal layer and a Ni or Cu metal layer on the surface of the part, uncovered with aluminum foil, of the aluminum oxide ceramic; 3, the aluminum oxide ceramic on which the metal layers are deposited is placed into a vacuum sintering furnace, the vacuum sintering furnace is vacuumized, heating is started when the vacuum degree in the furnace reaches 4*10<-3> Pa, the temperature in the furnace is raised to 430 DEG C-480 DEG C and is kept for 20-40 min, then the temperature is raised to 900 DEG C-1,200 DEG C and is kept for 20-60 min, after temperature keeping is finished, the aluminum oxide ceramic is cooled along with the furnace to the room temperature so that metallization of the aluminum oxide ceramic can be completed, and in the temperature rising and keeping processes, the vacuum degree in the furnace is kept higher than 6*10<-3> Pa. The process can be simplified, the metallization cost can be reduced, and the metallization effect of the high-purity aluminum oxide ceramic can be improved.
Aluminum oxide ceramic metallization method used for brazing
LI NING (Autor:in) / YAN JIAZHEN (Autor:in) / XIN CHENGLAI (Autor:in) / LIU WENBO (Autor:in) / CAO YONGTONG (Autor:in)
17.02.2016
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
Ceramic/metal brazing structure and ceramic metallization method
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Ultrahigh-purity aluminum oxide ceramic metallization method
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