Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Setter plate suitable for tubular rotary ceramic target material and sintering method
The invention discloses a setter plate suitable for a tubular rotary ceramic target material and a sintering method. A concave conical inclined surface is arranged on the upper portion of the setter plate, the inclination angle of the conical inclined surface relative to the horizontal plane ranges from 15 degrees to 60 degrees, and the surface roughness of the conical inclined surface ranges from3.2 microns to 16 microns. A tubular rotary ceramic target material green body is placed on the setter plate with the concave conical inclined surface at the upper part for sintering; the bottom of the target material and the conical inclined surface of the setter plate form a moving surface to promote sufficient sintering of the target material. By optimizing the inclination angle and the surface roughness of the conical inclined surface on the setter plate, the friction force between the target material green body and the setter plate due to shrinkage during sintering can be greatly reduced, the target material densification is facilitated, the defects of deformation, cracking and the like of the target material are prevented, and the yield and the material taking rate of the target material are greatly improved.
本发明公开了一种适用于管状旋转陶瓷靶材的承烧板及烧结方法。所述承烧板的上部设有内凹的圆锥斜面，所述圆锥斜面相对于水平面的倾斜角为15°‑60°，所述圆锥斜面的表面粗糙度为3.2‑16μm。本发明通过将管状旋转陶瓷靶材生坯置于上部设有内凹的圆锥斜面的承烧板上进行烧结，靶材的底部与承烧板的圆锥斜面形成移动面，促进靶材的充分烧结，通过优化承烧板上圆锥斜面的倾斜角度和表面粗糙度，可极大的降低靶材生坯在烧结时因收缩导致与承烧板的摩擦力，有利于靶材致密化及防止靶材产生变形、开裂等缺陷，极大的提高了靶材的良率及取材率。
Setter plate suitable for tubular rotary ceramic target material and sintering method
The invention discloses a setter plate suitable for a tubular rotary ceramic target material and a sintering method. A concave conical inclined surface is arranged on the upper portion of the setter plate, the inclination angle of the conical inclined surface relative to the horizontal plane ranges from 15 degrees to 60 degrees, and the surface roughness of the conical inclined surface ranges from3.2 microns to 16 microns. A tubular rotary ceramic target material green body is placed on the setter plate with the concave conical inclined surface at the upper part for sintering; the bottom of the target material and the conical inclined surface of the setter plate form a moving surface to promote sufficient sintering of the target material. By optimizing the inclination angle and the surface roughness of the conical inclined surface on the setter plate, the friction force between the target material green body and the setter plate due to shrinkage during sintering can be greatly reduced, the target material densification is facilitated, the defects of deformation, cracking and the like of the target material are prevented, and the yield and the material taking rate of the target material are greatly improved.
本发明公开了一种适用于管状旋转陶瓷靶材的承烧板及烧结方法。所述承烧板的上部设有内凹的圆锥斜面，所述圆锥斜面相对于水平面的倾斜角为15°‑60°，所述圆锥斜面的表面粗糙度为3.2‑16μm。本发明通过将管状旋转陶瓷靶材生坯置于上部设有内凹的圆锥斜面的承烧板上进行烧结，靶材的底部与承烧板的圆锥斜面形成移动面，促进靶材的充分烧结，通过优化承烧板上圆锥斜面的倾斜角度和表面粗糙度，可极大的降低靶材生坯在烧结时因收缩导致与承烧板的摩擦力，有利于靶材致密化及防止靶材产生变形、开裂等缺陷，极大的提高了靶材的良率及取材率。
Setter plate suitable for tubular rotary ceramic target material and sintering method
一种适用于管状旋转陶瓷靶材的承烧板及烧结方法
LEI YU (Autor:in) / XIAO SHIHONG (Autor:in) / ZHAO MINGZENG (Autor:in) / ZHOU ZHIHONG (Autor:in) / XU JIWEN (Autor:in) / YANG YONGTIAN (Autor:in) / ZHOU ZHAOYU (Autor:in) / ZHOU ZHAOYIN (Autor:in)
28.04.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
/
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
Sintering method for tubular rotary ceramic target material
| Europäisches Patentamt | 2020
Zirconia ceramic setter plate for MnZn ferrite sintering
| Europäisches Patentamt | 2015
Mullite ceramic setter plate for MnZn ferrite sintering
| Europäisches Patentamt | 2015
Setter plate applied to low-temperature co-sintering ceramic sintering
| Europäisches Patentamt | 2016